| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure system which is capable of effectively using an optical system having no lens action. SOLUTION: The exposure system is equipped with an output coupler 3, and the output coupler 3 is supported in a freely movable manner in a plane vertical to an optical axis so as to position an unused region as a light transmitting region. COPYRIGHT: (C)2005,JPO&NCIPI
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