SPIN COATER AND SPIN-COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a spin coater which has a simple structure, ensures an evenness of a coating material and is easy to adjust, and a spin-coating method. SOLUTION: The spin coater has a mounting base 21 supporting a substrate 1 and a driving section 23 rotating the mounting base 21 in such a way that a resin R dropped on the substrate 1 is spread. It also has an opposite section 4 opposite to the coated surface of the resin R on the substrate 1, and the opposite section 4 has an opening 42 causing a gas to flow into between the surface of the substrate 1 and the opposite section 4 and an accessing section 41 accessing the vicinity of the peripheral edge of the substrate 1 in such a way as to change the flow rate of the air flow A on the surface of the substrate 1 generated by rotation of the substrate 1. COPYRIGHT: (C)2007,JPO&INPIT