| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a coating film such as an organic film with an even thickness and high quality on an optical disk regardless of the coating solution properties. <P>SOLUTION: As a mist scattering prevention member, a scattering prevention plate is installed at a position horizontal to the face of a substrate to be coated with the coating film and a plurality of other scattering prevention plates are arranged parallel to the scattering prevention plate. Accordingly, excess coating solution on the substrate flows to the mist scattering prevention member horizontal to the face of a substrate to be coated with the coating film and the mist generation can be prevented. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
