| 摘要 |
PROBLEM TO BE SOLVED: To prevent hydrogen voids from being densely formed when an oxide thin film is made of solid material. SOLUTION: Solid organic metal material is dissolved into an organic solvent, and the organic solvent loaded with the organic metal material is vaporized into material gas. A method of manufacturing the oxide thin film comprises a thermal decomposition means 1 for selectively thermally decomposing an organic solvent component contained in the above material gas, a trapping means 2 for trapping the decomposition products of the thermally decomposed organic solvent, and a film depositing means 3 for mixing oxidizing gas into the material gas from which the solvent component has been removed to deposit an oxide thin film on a deposition substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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