,申请号JP20030512998-传众专利搜索

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发明名称
摘要
申请公布号	JP2004535672(A)	申请公布日期	2004.11.25
申请号	JP20030512998	申请日期	2002.07.12
申请人		发明人
分类号	H05H1/46;H01J37/32;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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