| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection method for inspecting pass/fail precisely, a semiconductor chip visual inspection method, and a wafer visual inspection method. <P>SOLUTION: An inspection area is set to one image file to be inspected, and the pass/fail of the inspection area is determined by reading pass/fail criteria data predetermined to the image file. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
