| 摘要 |
PROBLEM TO BE SOLVED: To stably convey glass substrates by suppressing steps between floating air stages of each device within a tolerance. SOLUTION: Joint mechanisms 23 are provided between substrate inspection devices 2 to 4, respectively. Upstream sides of each of the floating air stages 8 to 10 are supported by fixing bridges 20 so as to be capable of swinging, and downstream sides can be vertically rotated by elastic members 21 via semi-fixing bridges 22. The upstream sides of the floating air stages 8 to 10 are moved vertically by connecting the joint mechanisms 23, and height of each stage surface 8a to 10a of each of the floating air stages 8 to 10 is set within the tolerance (r). COPYRIGHT: (C)2005,JPO&NCIPI
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