| 摘要 |
PROBLEM TO BE SOLVED: To prevent formation of defects caused by pit drop-off when a stamper is manufactured by peeling off an Ni peel film from an Si substrate in a method for manufacturing the stamper for a high-density optical disk. SOLUTION: A thin film 102 is formed on a substrate 101. An electron beam resist film is formed on the thin film 102, the resist film is irradiated with an electron beam and the resist film is exposed, and the resist film is developed by developer. Using the developed resist film as a mask, the thin film 102 is subjected to reactive ion etching to form an irregular pattern on the thin film 102. A peel film 104 made of a material whose expansion rate is larger than that of the thin film 102 is formed on the thin film 102. The thin film 102 and the peel film 104 are cooled with a coolant such as liquid nitrogen or liquid helium, and the peel film 104 is peeled off from the substrate 101 to manufacture a stamper. COPYRIGHT: (C)2005,JPO&NCIPI
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