发明名称 |
Integrated monolithic tri-axial micromachined accelerometer |
摘要 |
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.
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申请公布号 |
US2004231420(A1) |
申请公布日期 |
2004.11.25 |
申请号 |
US20040786787 |
申请日期 |
2004.02.24 |
申请人 |
XIE HUIKAI;FEDDER GARY K.;PAN ZHIYU;FREY WILLIAM |
发明人 |
XIE HUIKAI;FEDDER GARY K.;PAN ZHIYU;FREY WILLIAM |
分类号 |
A63B71/06;B81B3/00;G01P15/08;G01P15/125;G01P15/18;(IPC1-7):G01P15/125 |
主分类号 |
A63B71/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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