| 发明名称 |
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL |
| 摘要 |
A thermopile-based detector (20) for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes. |
| 申请公布号 |
WO2004010462(A3) |
申请公布日期 |
2004.11.25 |
| 申请号 |
WO2003US13937 |
申请日期 |
2003.05.05 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
ARNO, JOSE |
| 分类号 |
C23C16/52;G01N21/35;H01L21/00;H01L21/205 |
主分类号 |
C23C16/52 |
| 代理机构 |
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