Sealing module for shaft reaching from normal pressure chamber with shaft rotary drive into high vacuum chamber, with dynamic shaft seal on rotary fitted socket in casing through which shaft passes

摘要

Sealing module for shaft (26) reaching from normal pressure chamber (13), with rotary shaft drive, into high vacuum chamber (3) comprises housing (1) with rotary fitted socket (12), through which shaft can concentrically pass.Socket is held on shaft by numerous elastic rings (29) by friction in static sealing agaisnt housing. Socket is dynamically sealed by radial shaft sealing rings (32-34) with elastomer sealing lips, pressed onto socket by tensile coiled springs (38). Preferably shaft sealing rings form between them prevacuum chambers (39) with intermediate suction as two-stage dynamic sealing.