SYSTEM AND METHOD FOR LAMP SPLIT ZONE CONTROL,申请号EP20030713856-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR LAMP SPLIT ZONE CONTROL
摘要
申请公布号	EP1479267(A1)	申请公布日期	2004.11.24
申请号	EP20030713856	申请日期	2003.03.04
申请人	APPLIED MATERIALS, INC.	发明人	JENNINGS, DEAN
分类号	H05B3/00;C30B31/12;H01L21/26;H01L21/324;(IPC1-7):H05B3/00;C23C14/54;C23C16/48;C30B25/10;H01L21/00	主分类号	H05B3/00
代理机构		代理人
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