发明名称 METAL PATTERNING METHOD USING SOLID BRIDGE
摘要 <p>A method for forming a metal pattern using a solid bridge is provided to form a metal electrode pattern without performing an exposure process and an etch process. A molding layer is formed on a master mold. A supporting layer is formed on the molding layer. A stamp(110) is formed by hardening the molding layer and the supporting layer. The stamp is separated from the master mold. A metal oxide layer is formed on a surface of the stamp. A transfer target substrate(107) is prepared. A metal oxide layer is formed on the transfer target substrate. The stamp comes in contact with the transfer target substrate. The stamp is separated from the transfer target substrate.</p>
申请公布号 KR20080023474(A) 申请公布日期 2008.03.14
申请号 KR20060087414 申请日期 2006.09.11
申请人 LG ELECTRONICS INC. 发明人 KIM, SANG HOON;LEE, KI DONG;SUNG, MYUNG MO;CHO, YEON HEE;LEE, BYOUNG HOON
分类号 H01L21/027 主分类号 H01L21/027
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