| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid formulation-dripping device which requires no highly precise positional alignment and sufficiently cleans a nozzle. SOLUTION: A gap-forming member 25 is provided in a nozzle 17 so that a prescribed gap 26 may be formed, in the nozzle 17, between the outer peripheral surface of the nozzle 17 and the inner peripheral surface of a ring part 25b, and a vacuum pad 51, the diameter of whose lip 51b is smaller than the outer diameter of the ring part 25b and larger than the inner diameter of the ring part 25b, is provided in a nozzle cleaner 50. The cleaning of the nozzle 17 drives a pump 53, in a state in which the vacuum pad 51 contacts the lower surface of the ring part 25b, to suck air. COPYRIGHT: (C)2008,JPO&INPIT
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