发明名称 |
Microelectronic Multiple Electron Beam Emitting Device |
摘要 |
An electronic emission device emitting plural beams of electrons and including a first structure of a plurality of electron beam emission micro-sources, and a second structure opposite the first structure for collecting electrons emitted by the first structure and for carrying out a secondary emission following the collection. The device can be applied in particular to the field of direct writing lithography.
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申请公布号 |
US2008169429(A1) |
申请公布日期 |
2008.07.17 |
申请号 |
US20060814228 |
申请日期 |
2006.01.24 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
NICOLAS PIERRE;DESIERES YOHAN |
分类号 |
G01J1/58 |
主分类号 |
G01J1/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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