Method and device for determining gas flow

摘要

A gas flow determination method and a corresponding gas flow determination device. A sensor device including a diaphragm and a frame enclosing it is provided; a predetermined temperature profile is created on the diaphragm; the gas flow to be determined is directed over the diaphragm in a predetermined direction of flow; the change in the temperature profile caused by the gas flow is detected; and the gas flow is determined on the basis of the change thus detected. The temperature at a third location on the diaphragm upstream from the first location and optionally at a fourth location downstream from the second location is regulated at a value corresponding to the local value of the predetermined temperature profile. In this manner, the effect of soiling on the diaphragm may be minimized effectively.