发明名称 Methods for manufacturing resistors using a sacrificial layer
摘要 An electrical resistor is made by providing a sacrificial layer and conductive pads disposed on a first surface of the sacrificial layer. An electrically resistive material is deposited over the pads and on the first surface of the sacrificial layer to form at least one unit including the resistive material and the pads. At least part of the sacrificial layer is then removed so as to expose one or more of the pads.
申请公布号 US6821821(B2) 申请公布日期 2004.11.23
申请号 US20000732821 申请日期 2000.12.08
申请人 TESSERA, INC. 发明人 FJELSTAD JOSEPH
分类号 D21F1/06;D21G9/00;H01L21/48;H01L21/56;H01L21/68;H01L23/31;H01L25/18;(IPC1-7):H01L21/48;H01C17/00 主分类号 D21F1/06
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