| 摘要 |
An exhaust gas processing apparatus using atmospheric plasma is provided to prevent a solid deposit from being stuck to the inner wall of an exhaust pipe by analyzing and exhausting the composition of gas exhausted from an exhaust pipe of a bake apparatus. An insulation pipe(100) is connected to an exhaust pipe(40) in a manner that exhaust gas can pass. A high voltage electrode part(200) is installed in the inner or outer portion of the insulation pipe, separated from the end of the insulation pipe. A low voltage electrode part(300) is installed in the inner or outer portion of the insulation pipe, separated from the high voltage electrode part and the end of the insulation pipe. A power part(400) applies a voltage to a gap between the high voltage electrode part and the low voltage electrode part. The high voltage electrode part and the low voltage electrode part can be installed in the inner portion of the insulation pipe.
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