3D CMOS TRANSISTOR AND MANUFACTURING METHOD AT THE SAME

摘要

A three-dimensional FET(field effect transistor) is provided to enable fabrication of devices of various types and shapes by increasing integration of a device and by using all the sidewalls of a fin. A semiconductor substrate(100) has NMOS and PMOS activation regions. The NMOS activation region includes an n-channel region and a source/drain region separated from the n-channel region. The PMOS activation region includes a p-channel region and a source/drain region separated from the p-channel region. The NMOS and PMOS activation regions are formed on the sidewall of the substrate. Gate electrodes(200,210) as upper portions of the n-channel region and the p-channel region are formed on each sidewall of the semiconductor substrate. Gate insulation layers(300,310) are formed between the gate electrodes and the p- and n- channel regions. The height of the NMOS gate electrode can be different from that of the PMOS gate electrode.