| 摘要 |
An apparatus for monitoring vibration of a high-speed air spindle is provided to reduce the vibration of the air spindle by searching for various factors causing the vibration based on theory analysis and response measurement for a dynamic characteristic of the air spindle of 60,000 rpm. An apparatus for monitoring vibration of a high-speed air spindle(210) includes a monitor target(200), a vibration detector(300), and a signal processing unit(400). The vibration detector measures vibration of the monitor target. The signal processing unit converts a signal transmitted from the vibration detector to inform a worker of the signal. The monitor target includes the spindle, a speed adjusting unit(220), an air supplying unit(230), and a humidity adjusting unit(240).
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