| 摘要 |
PURPOSE: A micro-machine having a frequency selection function and a fabricating method thereof are provided to reduce total electrical capacity by forming a groove in an insulating layer between a first electrode and a second electrode. CONSTITUTION: A micro-machine includes an insulating layer, a first electrode, a second electrode, and an oscillator. The insulating layer(12) is formed on a substrate(11). The first electrode(14) is formed on the insulating layer and is used for receiving signals. The second electrode(15) is formed on the insulating layer and is used for outputting the signals. The oscillator electrode(19) is opposite to the first electrode and the second electrode while being spaced therefrom by an air gap. The insulating layer has a groove which is formed therein at least between the first electrode and the second electrode. |
