发明名称 |
LIQUID DROPLET DISCHARGE DEVICE, LIQUID DROPLET DISCHARGE METHOD, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRONIC DEVICES, AND SUBSTRATE |
摘要 |
PURPOSE: A liquid droplet discharge device, a liquid droplet discharge method, a method for manufacturing an electro-optical device, an electro-optical device, electronic devices, and a substrate are provided to maintain the discharge precision of a functional liquid even if the size of a substrate is changed due to temperature change. CONSTITUTION: A liquid droplet discharge device(1) performs lithography on a work(W) by selectively discharging a functional liquid from nozzle rows(6) arranged in a functional liquid droplet discharge head(5). The liquid droplet discharge device comprises a linear scale(52) composed of mark rows which are serially marked on the work, an encoder(50) composed of a linear sensor(51), and a drive control unit controlling the discharge of the functional liquid from the nozzle rows based on the counting result of the linear scale. The linear scale has a reference mark(M1) indicating the detection starting position of each lithography area(W1). The reference mark is different from other marks(M).
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申请公布号 |
KR20040098538(A) |
申请公布日期 |
2004.11.20 |
申请号 |
KR20040032661 |
申请日期 |
2004.05.10 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MIZUTANI SEIGO |
分类号 |
G02F1/13;B05C5/00;B05D5/12;B41J2/01;G09F9/00;H01L21/288;H01L51/40;H01L51/50;H05B33/10;H05B33/14;H05K1/02;H05K3/00;H05K3/12;(IPC1-7):B41J2/01 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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