发明名称 LIQUID DROPLET DISCHARGE DEVICE, LIQUID DROPLET DISCHARGE METHOD, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRONIC DEVICES, AND SUBSTRATE
摘要 PURPOSE: A liquid droplet discharge device, a liquid droplet discharge method, a method for manufacturing an electro-optical device, an electro-optical device, electronic devices, and a substrate are provided to maintain the discharge precision of a functional liquid even if the size of a substrate is changed due to temperature change. CONSTITUTION: A liquid droplet discharge device(1) performs lithography on a work(W) by selectively discharging a functional liquid from nozzle rows(6) arranged in a functional liquid droplet discharge head(5). The liquid droplet discharge device comprises a linear scale(52) composed of mark rows which are serially marked on the work, an encoder(50) composed of a linear sensor(51), and a drive control unit controlling the discharge of the functional liquid from the nozzle rows based on the counting result of the linear scale. The linear scale has a reference mark(M1) indicating the detection starting position of each lithography area(W1). The reference mark is different from other marks(M).
申请公布号 KR20040098538(A) 申请公布日期 2004.11.20
申请号 KR20040032661 申请日期 2004.05.10
申请人 SEIKO EPSON CORPORATION 发明人 MIZUTANI SEIGO
分类号 G02F1/13;B05C5/00;B05D5/12;B41J2/01;G09F9/00;H01L21/288;H01L51/40;H01L51/50;H05B33/10;H05B33/14;H05K1/02;H05K3/00;H05K3/12;(IPC1-7):B41J2/01 主分类号 G02F1/13
代理机构 代理人
主权项
地址
您可能感兴趣的专利