| 摘要 |
PURPOSE: An impedance matching unit having a driving shaft surrounded with a ground member is provided to prevent damage of an RF generator and a process chamber and enhance the process efficiency by matching correctly the impedance of the RF generator and the process chamber. CONSTITUTION: An impedance matching unit is comprised of a housing, a fixed condenser member, a rotating condenser member, a driving shaft, and a ground member. The fixed condenser member is installed in the inside of the housing. Both ends of the fixed condenser member are connected to an RF generator and a predetermined load, respectively. The rotating condenser member is installed at a predetermined position corresponding to the fixed condenser member in order to control the impedance of the RF generator and the predetermined load. The driving shaft(133) is connected to the rotating condenser member in order to provide the rotary power for rotating the rotating condenser member. One side of the driving shaft is inserted into one end of the ground member(140). The other end of ground member is connected to a phase detection member. |
