DISK ASSEMBLY OF ION-IMPLANTATION EQUIPMENT

摘要

PURPOSE: A disk assembly of ion-implantation equipment is provided to detect exactly rotational speed by using a speed sensing part. CONSTITUTION: A disk assembly(100) of ion-implantation equipment includes disk pads, a disk(110), a rotational shaft, a motor driving part, and a sensing part. The rotational shaft(130) is installed at a lower center of the disk. The motor driving part(140) is used for spinning the disk by rotating the shaft. The sensing part(150) is used for detecting rotational speed of the shaft. The sensing part includes a light receiving sensor(152) installed at one point of the shaft and a light emitting sensor(154) for emitting light to the light receiving sensor.