TRANSFER APPARATUS AND METHOD FOR UNLOADING SEMICONDUCTOR SUBSTRATE FROM CONTAINER

摘要

PURPOSE: A transfer apparatus and method are provided to unload selectively a plurality of wafers from an FOUP(Front Open Unified Pod) by controlling corresponding vacuum lines of a multi-arm unit using a control unit. CONSTITUTION: A transfer apparatus includes a multi-arm unit, a control unit, and a vacuum pump. The multi-arm unit includes a plurality of blades(420) for adsorbing semiconductor substrates, a fixing body for fixing the blades, a transfer part for moving the fixing body, and a plurality of vacuum lines(450). The control unit is used for controlling the operation of the multi-arm unit. The vacuum pump is connected with the vacuum lines. The vacuum lines are formed in the blades, respectively. The vacuum lines are selectively opened and closed.