| 摘要 |
PROBLEM TO BE SOLVED: To provide a coaxial probe for inspection for a device for RF (radio frequency) capable of conducting highly reliable inspection without being affected by a noise, using an inexpensive contact probe of a coaxial structure, even when inspecting the device for RF with a very narrow pitch in interval between electrode terminals in recent years. SOLUTION: The contact probe 1 is inserted into an insertion hole 21 of a metal block 2 of which the projection length of plungers 11, 12 from a metal pipe 13 is variable. A fixing means 3 is provided to fix the contact probe 1 to the metal block 2 via an insulating substrate 31 for holding metal pipe end parts substantially concentrically with the insertion hole 21, and an outside diameter of the metal pipe 13 and an inside diameter of the insertion hole 21 are set respectively to form the coaxial structure of a prescribed impedance using the contact probe 1 as the center conductor and using the metal block 2 as an outer conductor. COPYRIGHT: (C)2005,JPO&NCIPI |
