| 摘要 |
PROBLEM TO BE SOLVED: To enable to set an energy width for a monochromator having high energy resolution used in a transmission electron microscope. SOLUTION: The monochromator 20 set directly under an electron source 11 and before an accelerating step 16 of the transmission electron microscope is provided with a diaphragm 12 along a light axis of electron beams, a first Vienna filter 13 fitted at a hind step of the diaphragm 12 impressing electromagnetic fields crossing each other perpendicularly to the light axis and dispersing the electron beams to a direction of an electric field according to kinetic energy, a fixed parallel slit 14 of a given width set at a hind step of the first Vienna filter and transmitting only charged particle beams within a given distance to the direction the electric field from the light axis, a second Vienna filter 15 set at a hind step of the slit 14 and correcting achromatically and stigmatically the electron beams transmitting the slit 14. The energy distribution width is set by controlling a degree of energy dispersion of the electron beams in the slit 14 through variation of intensity of the electromagnetic field in the first Vienna filter 13. COPYRIGHT: (C)2005,JPO&NCIPI
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