| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminate excellent in adhesion, reduced in the occurrence of a crack and the formation of a pinhole and having high gas barrier properties against water vapor or the like, and its manufacturing method. SOLUTION: The laminate is constituted by laminating a first layer being a metal layer 21, a second layer being a metal hydroxide layer 22 and a third layer being a metal compound layer 23 on at least a base material 20 and manufactured by laminating the first, second and third layers on the base material under pressure of 10<SP>-2</SP>Pa or below without exposing those layers to the atmosphere. Further, the surface of the first metal layer is subjected to discharge treatment in a water vapor atmosphere and, after the second metal hydroxide layer is formed on the first layer, the third layer comprising a metal compound thin film is laminated. COPYRIGHT: (C)2005,JPO&NCIPI
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