| 摘要 |
PROBLEM TO BE SOLVED: To provide a brazing filler metal coating method by which a work with a large area such as a sputtering target can uniformly be coated with a low melting point brazing filler metal (e.g., indium). SOLUTION: In the coating method where a coating film with a prescribed thickness is uniformly formed on the coating face in a planar coating object, a stage where a low melting point brazing filler metal is melted at a syringe part, and ultrasonic vibration is applied to the melted brazing filler metal, and a stage where the opening part of the tip of a nozzle is made relatively close to the surface of the coating face, the nozzle is relatively moved while retaining prescribed intervals from the coating face, and the low melting point brazing filler metal is applied thereto are provided. COPYRIGHT: (C)2005,JPO&NCIPI
|
