SURFACE ACOUSTIC WAVE PRESSURE SENSOR WITH MICROSTRUCTURE SENSING ELEMENTS

摘要

A pressure and temperature sensor system, the system comprising one or more microstructure temperature-sensing elements (502, 504) formed on a substrate within a hermetically sealed area thereof, wherein such microstructure temperature-sensing elements (502, 504) comprise SAW temperature-sensing elements (502, 504). Additionally, one or more microstructure pressure-sensing elements (506) can be located above a sensor diaphragm (508) on the substrate, such that the microstructure pressure-sensing element (506) is formed from a SAW pressure-sensing element (506). One or more contacts (110, 112) can also be provided, which assist in maintaining the hermetically sealed area and which protrude through the substrate for support and electrical interconnection of the pressure and temperature sensor system.