MEHRSCHICHTSPIEGEL FÜR XUV-STRAHLUNG UND VERFAHREN ZUR DESSEN HERSTELLUNG,申请号DE20026001599-传众专利搜索

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发明名称	MEHRSCHICHTSPIEGEL FÜR XUV-STRAHLUNG UND VERFAHREN ZUR DESSEN HERSTELLUNG
摘要
申请公布号	DE60201599(D1)	申请公布日期	2004.11.18
申请号	DE20026001599	申请日期	2002.05.21
申请人	STICHTING FUND OND MATERIAL	发明人	BIJKERK FREDERIK;LOUIS ERIC;KESSELS JOSEF;VERHOEVEN JAN;DEN HARTOG JOHANNES
分类号	G21K1/06;(IPC1-7):G21K1/06	主分类号	G21K1/06
代理机构		代理人
主权项
地址

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