HIGH-FREQUENCY INDUCTION HEATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-frequency induction heating device capable of temperature control with high accuracy even if the number of division of heating coils is increased in high-frequency induction heating of a comparatively large area. SOLUTION: The high-frequency induction heating device is provided with a plurality of high-frequency induction heating coils 1 consisting of magnetic substance cores and coil conductors, a plurality of high-frequency power supply device 4 fitted in correspondence with each high-frequency heating coil for feeding high-frequency power to each heating coil, a temperature distribution measuring device 14 measuring temperature distribution of a heated plate, and a temperature distribution control device 13 having a function of individually controlling output power of the high-frequency power supply device by operating in comparison temperature distribution data from the temperature distribution measuring device and a preset temperature table. COPYRIGHT: (C)2005,JPO&NCIPI