发明名称 METHOD OF MANUFACTURING MAGNETIC DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a magnetic detector manufacturing method capable of forming a structure of narrowing down a current passway easily with high accuracy. SOLUTION: A resist layer 40 provided with a cutout 40 provided at its lower part is formed on a multilayered film 21 deposited on a lower electrode layer 20, and a first gap layer 28 is formed on the top surface of a part of the multilayered film 21 that includes the inside of the cutout 40a and is not covered with the resist layer 40. By this setup, a prescribed space T1 can be provided to the first gap layer 28 in the widthwise direction of a track. In a following process, both end faces of the multilayered film 21 and the first gap layer 28 in the widthwise direction of a track are cut off. Therefore, the prescribed space T1 provided in the first gap layer 28 can be formed to a very small size with high accuracy, and the current pathway narrowing structure can be easily formed, so that the magnetic detector having a large resistance change volume (ΔR) and a high regeneration output can be manufactured. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004327565(A) 申请公布日期 2004.11.18
申请号 JP20030117751 申请日期 2003.04.23
申请人 ALPS ELECTRIC CO LTD 发明人 NISHIYAMA YOSHIHIRO;SAITO MASAJI;AOKI DAIGO
分类号 G11B5/39;H01L43/08;H01L43/12;(IPC1-7):H01L43/12 主分类号 G11B5/39
代理机构 代理人
主权项
地址