| 摘要 |
PROBLEM TO BE SOLVED: To prevent reduction in a degree of vacuum even when holding a vacuum state without supply of a vacuum in a vacuum valve unit. SOLUTION: A vacuum supply valve 19 and a vacuum breaker valve 20 are respectively installed and constituted by a two-port opening-closing valve; are constituted for communicating a vacuum output port 5 with an output communicating passage 32 for communicating both outputs; and respectively and independently perform switching of supply and stopping of the vacuum and switching of holding and breaking of the vacuum to these output communicating passage 32 and vacuum output port 5. Thus, even when stopping the supply of the vacuum, since these output communicating passage 32 and vacuum output port 5 are only cut off from a vacuum supply source, the degree of vacuum is maintained without being connected to the other connecting pipe. An installation space is omitted with a simple constitution of only juxtaposing two pilot solenoid valves 3 and 4 in one rectangular solid-shaped unit block 2. COPYRIGHT: (C)2005,JPO&NCIPI
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