Cleaning apparatus

摘要

The corrosion resistance against hydrogen fluoride of a cleaning apparatus using a high-pressure fluid is markedly improved by making at least the surfaces of portions in contact with hydrogen fluoride out of a Fe-based alloy or Ni-based alloy containing a predetermined amount of Cr. Even when cleaning is carried out with the high-pressure fluid containing hydrogen fluoride by this cleaning apparatus, the apparatus has excellent durability and is free from the eluation of a metal which causes the deterioration of a micro-structure as an object to be cleaned.