发明名称 |
Mark position detection apparatus |
摘要 |
A mark position detection apparatus has an illumination optical system for illuminating a measurement mark with illumination light and an imaging optical system for converging light reflected from the measurement mark to form an image of the measurement mark on an image pickup apparatus. The mark position detection apparatus measures a positional displacement of the measurement mark by processing an image signal obtained by the image pickup apparatus. The mark position detection apparatus has an optical element provided in the illumination optical system for compensating a difference in asymmetry of the image signal that depends on the wavelength of the illumination light.
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申请公布号 |
US2004227944(A1) |
申请公布日期 |
2004.11.18 |
申请号 |
US20040782814 |
申请日期 |
2004.02.23 |
申请人 |
NIKON CORPORATION |
发明人 |
FUKUI TATSUO;ENDO TAKESHI |
分类号 |
G01B11/00;G03F9/00;(IPC1-7):G01B11/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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