METHOD FOR MANUFACTURING ELECTRON-EMITTING DEVICE AND METHOD FOR MANUFACTURING DISPLAY HAVING ELECTRON-EMITTING DEVICE

摘要

A method for manufacturing an electron-emitting device is disclosed wherein damage to an emitter material (such as carbon nanotubes) during removal of a protective film is reduced. The method for manufacturing an electron-emitting device comprises a first step wherein an emitter layer (10) containing carbon nanotubes (11) which serve as a fibrous emitter material is formed on a cathode (5), a second step wherein an insulating layer (6) and a gate electrode (7) are formed on the emitter layer (10) via a protective film (22), a third step wherein a gate hole (8) is formed through the insulating layer (6) and the gate electrode (7) on the emitter layer (10), and a fourth step wherein the protective film (22) exposed by the formation of the gate hole (8) is removed using a weakly acidic etching solution.