IMPRINT DEVICE AND IMPRINT METHOD

摘要

An imprint device according to the invention comprises an elastic deformation section (4) for pressing the other surface of a stamper (61) formed with raised and recessed portions on one surface thereof and having flexibility to thereby press the raised and recessed portions against a resist layer (52) on a disk-like base material (51) to transcribe the shape of raised and recessed portions onto the resist layer (52), and a squeezing mechanism (6) for adjusting the pressing range for the stamper (61) by the elastic deformation section (4), wherein the squeezing mechanism (6) multistep-wise or steplessly gradually enlarges the pressing range starting from the state in which a predetermined portion (central portion) of the other surface of the stamper (61) is pressed against the elastic deformation section (4), and the entire region of the other surface of the stamper (61) is pressed.