| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for homogenizing light intensity by a simple means in a beam of light generated by a light source. <P>SOLUTION: At least one prism 14 having at least two surfaces 16, 17, 18, and 19 of substantially surface parallelism, is arranged in a light beam passage of the beam of light 13 between the light source 12 and an object O9 as a part of a projection optical system. The prism 14 is movably supported, and is driven by a driving device. Thus, the beam of light 13 is dislocated in parallel by predetermined quantity X in relation to a position of the prism 14 when passing through the surface-parallelism surfaces 16, 17, 18, and 19 of the prism 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
