发明名称 SCANNING PROBE MICROSCOPE
摘要 <P>PROBLEM TO BE SOLVED: To provide a SPM having the function of automatically setting parameter information peculiar to a scanner to a controller without requiring the manual operation of an operator when exchanging the scanner. <P>SOLUTION: The SPM comprises a means for showing information on the scanner at one portion of the scanner; a means for reading the information at a body side, where the scanner is fitted; and a means for setting the parameter information peculiar to the scanner to the controller, based on the read information. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004325075(A) 申请公布日期 2004.11.18
申请号 JP20030115617 申请日期 2003.04.21
申请人 SII NANOTECHNOLOGY INC 发明人 KITAJIMA SHU;SHIGENO MASAJI
分类号 G01Q10/04;G01Q30/04;G01Q90/00 主分类号 G01Q10/04
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