摘要 |
PROBLEM TO BE SOLVED: To provide an active matrix substrate capable of improving the aperture rates of pixels without reducing display quality. SOLUTION: The active matrix substrate is provided with a substrate 1 and a thin film transistor and a capacity element 19 which are formed on the main surface of the substrate 1. The thin film transistor has a semiconductor layer including a channel area. The capacity element 19 has a dielectric film 4 for capacity and +- lower capacity electrode 3 and an upper capacity electrode 5 which are arranged so as to be opposed to each other through the dielectric film 4. The substrate has a recessed part 2 on its main surface and the main surface has an upper surface 1a, a base 2a for regulating the recessed part 2 and side faces 2b continued to the base 2a and the upper surface 1a. The capacity element 19 is arranged on the substrate side from the thin film transistor so as to be superposed to a channel area 7c of the thin film transistor when it is observed from a substrate direction and extended from at least a part of the base 2a of the recessed part 2 up to at least a part of the side faces 2b. COPYRIGHT: (C)2005,JPO&NCIPI |