摘要 |
PROBLEM TO BE SOLVED: To provide a high performance carrier plate having a small level difference, a carrier plate manufacturing method for inexpensively and efficiently manufacturing this carrier plate, and a grinding machine used for this method. SOLUTION: Steps of respective surfaces is formed in 35μm or less in a boundary part between a plate body 22 and an electronic part support 29, by applying finishing work by polishing cloth paper 44 to the respective surfaces of the plate body 22 and the electric part support 29, after arranging the electronic part support 29 in the plate body 22. The polishing cloth paper 44 is installed on a contact wheel 42 and an idler wheel 43 formed of a rubber roller of the grinding machine 41 in an extending state, and is provided for the finishing work by contacting with the respective surfaces of the plate body 22 and the electronic part support 42 via the contact wheel 42. COPYRIGHT: (C)2005,JPO&NCIPI |