MANUFACTURING METHOD AND MANUFACTURING EQUIPMENT FOR OPTICAL PART

摘要

PROBLEM TO BE SOLVED: To prevent the lowering of yield due to the deviation arising at the time of laminating a dichroic film whose thickness increases gradually at a specified angle on a transparent substrate. SOLUTION: A dichroic mirror component 1 is formed by laminating a dichroic films 3 of gradually increasing film thickness at a specified angle on a transparent substrate component 2 the size of which is larger than that of a transparent substrate used as a product. The light made incident at the same angle as a dichroic mirror 4 to be used as the product is made incident on a component 1 while the component 1 is moved, a reference position 1C where the desired spectral transmission characteristic can be obtained is detected. Cut surfaces 1A and 1B separated by a specified distance in the direction where the film thickness increases are cut by a cutting member 57 from the reference position 1C and the dichroic mirror 4 to be used as the product is cut out thereof. COPYRIGHT: (C)2005,JPO&NCIPI