| 摘要 |
PROBLEM TO BE SOLVED: To simplify the manufacturing process of a liquid ejection head while enhancing the strength and ink resistance of the head structure. SOLUTION: A common electrode 2 is formed on a base substrate 1 and a spacer (gap holding member) 4 provided with a pattern opening having the shape of a resonance driving part is bonded thereon. After a thin film layer consisting of a piezoelectric thin film 3 and a driving electrode 5 is formed on the spacer 4, the thin film layer is removed from the opening of the spacer 4 and a nozzle plate 6 is bonded to the exposed surface. The piezoelectric thin film 3 and the thin film layer becoming the driving electrode 5 do not require patterning. Furthermore, high strength and excellent ink resistance are ensured because the side face of the piezoelectric thin film 3 becoming the resonance driving part is covered with the spacer 4. COPYRIGHT: (C)2005,JPO&NCIPI
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