Magnetic guiding apparatus

摘要

A magnetic guiding apparatus guides a moving member by attracting a target with electromagnets provided on the moving member. The magnetic guiding apparatus has a magnetic-flux detection device movable along the target to detect magnetic flux of the target and a position measuring unit measures the position of the magnetic-flux detection device. A control unit detects the position of magnetic flux in the target from the position information obtained by the position measuring unit and the magnetic-flux information obtained from the magnetic-flux detection device and performs demagnetization at the detected magnetic flux position.