发明名称 |
Integrated circuits with openings that allow electrical contact to conductive features having self-aligned edges |
摘要 |
A widened contact area (170X) of a conductive feature (170) is formed by means of self-alignment between an edge (170E2) of the conductive feature and an edge (140E) of another feature (140). The other feature ("first feature") is formed from a first layer, and the conductive feature is formed from a second layer overlying the first layer. The edge (170E2) of the conductive feature is shaped to provide a widened contact area. This shaping is achieved in a self-aligned manner by shaping the corresponding edge (140E) of the first feature.
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申请公布号 |
US2004227245(A1) |
申请公布日期 |
2004.11.18 |
申请号 |
US20030440500 |
申请日期 |
2003.05.16 |
申请人 |
DING YI |
发明人 |
DING YI |
分类号 |
H01L21/336;H01L21/4763;H01L21/60;H01L21/768;H01L21/8247;H01L23/48;H01L27/105;(IPC1-7):H01L23/48 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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