发明名称 |
FILTER CARTRIDGE FOR FLUID FOR TREATING SURFACE OF ELECTRONIC DEVICE SUBSTRATE |
摘要 |
<p>It is the purpose of the present invention to provide filter cartridges which can suitably be utilized in purifying chemical fluids for treating the surface of an electronic device substrate to be used in the semiconductor industry, particularly fluids containing a basic compound such as ammonia and an ammonium salt, or hydrofluoric acid (HF). The filter cartridges relating to the present invention which are used in removing metallic impurities contained in a chemical fluid for treating the surface of an electronic device substrate by treating the chemical fluid, is characterized by having a filter material incorporated therein, into which functional groups compatible with the existing morphology of the metallic impurities to be removed are incorporated in compliance with the constituents of the chemical fluid to be treated and the types of the metallic impurities to be removed.</p> |
申请公布号 |
WO2004099086(A1) |
申请公布日期 |
2004.11.18 |
申请号 |
WO2004JP06190 |
申请日期 |
2004.04.28 |
申请人 |
EBARA CORPORATION;KOMATSU, MAKOTO;FUJIWARA, KUNIO;HASHIMOTO, YUKIO |
发明人 |
KOMATSU, MAKOTO;FUJIWARA, KUNIO;HASHIMOTO, YUKIO |
分类号 |
G03F7/30;B01D61/00;B01D67/00;B01J43/00;B01J45/00;B01J47/12;B08B3/14;C02F1/42;G03F7/42;H01L21/304;(IPC1-7):C02F1/42 |
主分类号 |
G03F7/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|