| 摘要 |
PURPOSE: A surface acoustic wave device using diamond is provided to restrain accumulation of static electricity and prevent damage of a substrate by using electro-conductive diamond in which a dopant is doped. CONSTITUTION: A surface acoustic wave device includes a base material, at least a diamond film, a piezoelectric-material film, and an electrode. The diamond film(12), the piezoelectric-material film(13), and the electrode(14) are formed on the base material(11). All parts or some part of the diamond film is formed with electro-conductive diamond in which a dopant is doped. In the surface acoustic wave device, the diamond film is formed by a vapor phase synthetic method. In the surface acoustic wave device, an electrical resistivity of the electro-conductive diamond is 10¬13>¥Øcm or less at 20 degrees centigrade. |
