发明名称 METHOD OF CALCULATING DRAIN CURRENT AND METHOD FOR CALCULATING STRESS
摘要 PROBLEM TO BE SOLVED: To enhance calculation accuracy of the drain current of an MOS transistor. SOLUTION: At first, a model formula of stress is obtained in the longitudinal direction of the channel of an MOS transistor having parameters of the length and width of an active region and in the lateral direction perpendicular thereto. Based on the length and width of the active region of an MOS (metal oxide semiconductor) transistor for calculating the drain current and the model formula of stress, mobility is calculated when a stress acts in the active region. Drain current is calculated using the mobility when a stress acts. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004327463(A) 申请公布日期 2004.11.18
申请号 JP20030115503 申请日期 2003.04.21
申请人 RENESAS TECHNOLOGY CORP 发明人 UCHIDA TETSUYA
分类号 G06F17/50;H01L21/336;H01L21/76;H01L29/00;H01L29/78;(IPC1-7):H01L21/336 主分类号 G06F17/50
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