| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode ring in which the extraction efficiency of secondary electrons emitted from a test piece is improved, and provide an electron microscope having the same. SOLUTION: The electrode ring 1 is constructed of an insulating tube 2 having a hollow part 6, an electrode membrane 3 for voltage impression which is formed on the end face opposed to the test piece with a fine gap and has an equal potential to the test piece, a grounding electrode membrane 4 which is formed and grounded on the other end face, and a resistance membrane 11 which is formed on the inner face of the hollow part 6 and connects between the electrode membrane 3 for voltage impression and the grounding electrode membrane 4. COPYRIGHT: (C)2005,JPO&NCIPI
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